Tantalum Silicide (TaSi2) Sputtering Targets

InquiryData sheet
Tantalum pentoxide, also known as tantalum(V) oxide, is the inorganic compound with the formula Ta2O5. It is a white solid that is insoluble in all solvents but is attacked by strong bases and hydrofluoric acid. Ta2O5 is an inert material with a high refractive index and low absorption (i.e. colourless), which makes it useful for coatings. It is also extensively used in the production of capacitors, due to its high dielectric constant.

Material Notes

Tantalum Oxide Sputtering Target, Purity is 99.95%; Circular: Diameter <= 14inch, Thickness >= 1mm; Block: Length <= 32inch, Width <= 12inch, Thickness >= 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.

We also have high quality pure tantalum sputtering targets with 99.95% purity  for sale.

Related Products